tokens
sequence
ner_tags
sequence
[ "The", "FINFET", "of", "claim", "11", ",", "wherein", "the", "conformal", "gate", "dielectric", "comprises", "a", "high-κ", "gate", "dielectric", "selected", "from", "the", "group", "consisting", "of:", "hafnium", "oxide", "(HfO", "2", "),", "lanthanum", "oxide", "(La", "2", "O", "3", "),", "and", "combinations", "thereof." ]
[ 0, 3, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 2, 1, 0, 0, 0, 2, 1, 0, 0, 0, 0, 0, 0, 0, 0 ]
README.md exists but content is empty. Use the Edit dataset card button to edit it.
Downloads last month
16
Edit dataset card