tokens
sequence | ner_tags
sequence |
|---|---|
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"of",
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"wherein",
"the",
"conformal",
"gate",
"dielectric",
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"the",
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"(HfO",
"2",
"),",
"lanthanum",
"oxide",
"(La",
"2",
"O",
"3",
"),",
"and",
"combinations",
"thereof."
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